Key Features
- Auto-extendable BSE detector: a retractable four-segment backscattered-electron detector with high-sensitivity semiconductor elements optimizes SE imaging at short working distances and gives extra clearance for large, tall or complex-shaped specimens, minimizing collision risk
- Compact benchtop design with no complex installation and a minimal footprint, run from an intelligent, easy-to-learn user interface
- Resolution of 5 nm at 30 kV, with magnification from 30× to 300,000×
- Low vacuum mode observes non-conductive samples — ceramics, plastics, fibers, biological tissue — directly, without gold or carbon sputter coating
- Variable pressure mode from 10–150 Pa in 10 Pa steps, with gas-assisted charge compensation that suppresses charging artifacts, image drift and brightness fluctuation
- Optical navigation with one-button automatic brightness/contrast, focus and astigmatism adjustment
- Optional SE/BSE/EDS detection and image-stitching modules
Specifications
| Parameter | Specification |
|---|---|
| Emission source | Pre-aligned tungsten filament electron gun |
| Resolution | 5.0 nm |
| Magnification (photo) | 30× ~ 300,000× |
| Accelerating voltage | 1~30 kV |
| Detector | Secondary Electron Detector (ETD); optional Backscattered Electron Detector (BSED), EDS |
| Image format | TIFF, JPG, BMP, PNG |
| High vacuum mode | ≤5×10⁻⁴ Pa |
| Low vacuum mode (optional) | 6~150 Pa |
| Automatic stage | 3-axis (5-axis optional) |
| Stage moving range | X: 0~50 mm, Y: 0~50 mm, Z: 4~35 mm |
| Main unit dimensions | 400(W) × 620(D) × 680(H) mm |
| Weight | 110 kg |
| Room requirements | 2m × 2m × 2m |
| Power supply | AC 110/220V (±10%), 50/60Hz, 1.5kW |
| Temperature & humidity | 20±5°C, ≤60%RH |
Demonstrated on fiber samples at 20 Pa, 60 Pa and 150 Pa, the variable-pressure system holds stable, distortion-free imaging across the full range — with no gold or carbon coating required. A higher-throughput floor-standing sibling (PE-100) and a field-emission model (PE-300) are also available in the ModuleSci SEM range.
Intelligent Operating Software
ModuleSci’s self-developed SEM software captures an image in three guided steps: mount and set the sample, take a navigation image while the chamber evacuates, then navigate to the region of interest and capture the SEM image. Automatic brightness/contrast, focus and astigmatism adjustment run in the background, with live chamber monitoring throughout.
Photo-assist tools include dimension measurement, image mixing and gesture-based quick navigation, with optional image stitching for wide-field views.
Software at a Glance
- Workflow
- Mount sample → navigate & evacuate → locate ROI & capture
- Languages
- Korean, English, Chinese, French, German, Russian
- Photo-assist tools
- Dimension measurement, image mixing, gesture navigation, optional image stitching
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