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ModuleSci, South Korea

Field Emission SEM

Model: PicoEye-300 (PE-300)
Field Emission SEM — PicoEye-300 (PE-300)

Key Features

  • Advanced Schottky-type field emission electron source paired with a high-performance electron optical system for ultra-high imaging resolution
  • Resolution of 0.9 nm at 15 kV and 1.3 nm at 1 kV, with high-quality imaging at both conventional and low accelerating voltages
  • Low-voltage imaging observes non-conductive specimens directly, without conductive coating, preserving true surface morphology
  • Integrates SE imaging, BSE imaging and EDS on a single platform for comprehensive morphology, microstructure and elemental characterization
  • Rapid image acquisition with a large depth of field
  • Large-travel sample stage and an In-lens Detector (ILD) alongside the standard secondary-electron detector
  • Suited to research institutes, university laboratories and industrial quality control

Specifications

ParameterSpecification
Emission sourceSchottky-type thermal field emission electron source (ZrO/W)
Resolution0.9 nm @ 15kV, 1.3 nm @ 1kV
Magnification (photo)8× ~ 2,000,000×
Accelerating voltage0.02~30 kV
DetectorSecondary Electron Detector (ETD), In-lens Detector (ILD); optional Backscattered Electron Detector (BSED), EDS
Image formatTIFF, JPG, BMP, PNG
High vacuum mode≤2×10⁻⁵ Pa
Automatic stage5-axis
Stage moving rangeX: 0~130 mm, Y: 0~130 mm, Z: 2~50 mm
Main unit dimensions1000(W) × 1500(D) × 1700(H) mm
Weight800 kg
Room requirements4m × 4m × 2m
Power supplyAC 110/220V (±10%), 50/60Hz, 4kW
Temperature & humidity21±4°C, ≤60%RH

As a field-emission system, the PE-300 runs high vacuum only and uses low-voltage imaging — rather than a variable-pressure mode — to image non-conductive samples without coating. A tabletop model (PV-100P) and a compact floor-standing tungsten SEM (PE-100) are also available in the ModuleSci SEM range.

Application Examples

A sample of imaging results produced on the PE-300.

Porous Hollow SiO2 Spheres

5kV, SE imaging

Chitosan

20kV, SE imaging

RF Microsphere Aggregates

20kV, SE imaging

ZIF-8

20kV, SE imaging

Carbonized RF Spheres

20kV, SE imaging

Grain Particle Reference Standard

20kV, SE imaging

Intelligent Operating Software

ModuleSci’s self-developed SEM software captures an image in three guided steps: mount and set the sample, take a navigation image while the chamber evacuates, then navigate to the region of interest and capture the SEM image. Automatic brightness/contrast, focus and astigmatism adjustment run in the background, with live chamber monitoring throughout.

Photo-assist tools include dimension measurement, image mixing and gesture-based quick navigation, with optional image stitching for wide-field views.

Software at a Glance

Workflow
Mount sample → navigate & evacuate → locate ROI & capture
Languages
Korean, English, Chinese, French, German, Russian
Photo-assist tools
Dimension measurement, image mixing, gesture navigation, optional image stitching

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